Ultra-fast aerial image simulation algorithm using wavelength scaling and fast Fourier transformation to speed up calculation by more than three orders of magnitude

An ultra-fast image simulation algorithm is proposed. The new uses full fast-Fourier-transform (FFT) to calculate the aerial intensity. wavelength, 193 nm, was scaled a number of powers 2, through scaling mask with factor derived from discrete Fourier transform (FT) format. can then be transformed diffraction spectrum in terms spatial frequency using FFT algorithm. Similarly, this inverse aerial-image by inverse-FFT finally back original amplitude wavelength and squared Comparing FT, there 4000 × 5000 computation speed improvement only about 3% intensity deviation. This provides an efficient engine for lithography optimization.